经济型扫描狭缝光束分析仪(适用于小光斑测量)
DataRay公司的Beam’R2是一款适用于多种激光光束分析场景的高性价比设备。该仪器标配2.5微米精密狭缝,同时可选配刀口式狭缝,可测量直径小至2微米的光束。通过硅(Si)和铟镓砷(InGaAs)或扩展铟镓砷(InGaAs-extended)探测器的灵活选配,其波长覆盖范围可达190纳米至2500纳米。相比基于相机的系统,扫描狭缝技术能提供更高的分辨率。
核心特性
多探测器选项,覆盖190-2500纳米:
190-1150纳米(硅探测器)
650-1800纳米(铟镓砷探测器)
1800-2300/2500纳米(扩展铟镓砷探测器)
符合ISO标准的光束直径测量
USB 2.0接口供电
自动增益调节功能
可选配M²测量模块(符合ISO 11146标准)
True2D™狭缝技术
0.1微米级分辨率
5Hz刷新率(可调范围2-10Hz)
支持连续波/准连续波光束分析
光束直径范围:5微米至4毫米(刀口模式下可测2微米)
典型应用
超小激光光束分析
光学组件装配与仪器校准
OEM系统集成
透镜焦距测试
实时诊断聚焦与准直误差
多组件同步聚焦校准
搭配M2DU模块实现M²测量
True2D™ 狭缝技术解析
采用蓝宝石基底上的0.4微米金属多层薄膜结构
相比传统空气狭缝具有多重优势:
避免隧道效应(空气狭缝因深度大于宽度,在高能量照射下易变形)
Specification | Detail |
---|---|
Wavelength | Si detector: 190 to 1150 nm InGaAs detector: 650 to 1800 nm Si + InGaAs detectors: 190 to 1800 nm Si + InGaAs (extended) detectors: 190 to 2300 or 2500 nm |
Scanned Beam Diameters | Si detector: 5 µm to 4 mm‚ to 2 µm in Knife-Edge mode InGaAs detector: 10 µm to 3 mm‚ to 2 µm in Knife-Edge mode InGaAs (extended) detector: 10 µm to 2 mm‚ to 2 µm in Knife-Edge mode |
Beam Waist Diameter Measurement | Second moment (4s) diameter to ISO 11146; Fitted Gaussian & TopHat 1/e² (13.5%) width User selectable % of peak Knife-Edge mode for very small beams |
Measured Sources | CW, Quasi-CW beams |
Resolution Accuracy | 0.1 µm or 0.05% of scan range ± < 2% ± = 0.5 µm |
Maximum Power & Irradiance | 1 W Total & 0.5 mW/µm² |
Gain Range | 1‚000:1 Switched; 4‚096:1 ADC range |
Displayed Graphics | X-Y Position & Profiles‚ Zoom x1 to x16 |
Update Rate | ~5 Hz, adustable 2 to 10 Hz |
Pass/Fail Display | On-screen selectable Pass/Fail colors. Ideal for QA & Production. |
Averaging | User selectable running average (1 to 8 samples) |
Statistics | Min.‚ Max.‚ Mean‚ Standard Deviation Log data over extended periods |
XY Profile & Centroid | Beam Wander display and logging |
Minimum Requirements | Windows 10 64-bit |