{"id":234,"date":"2026-03-19T15:16:33","date_gmt":"2026-03-19T07:16:33","guid":{"rendered":"https:\/\/www.bihec.com\/beamimaging\/?p=234"},"modified":"2026-03-19T15:16:33","modified_gmt":"2026-03-19T07:16:33","slug":"beam-imaging-rfis-100%e7%a6%bb%e5%ad%90%e6%ba%90%e8%a3%85%e7%bd%ae%e3%80%81bis%e5%b0%84%e9%a2%91%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81bis-g-1%e5%92%8cg-2%e5%9e%8b%e7%a6%bb%e5%ad%90%e6%9e%aa%e5%8a%a0-3","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/beamimaging\/beam-imaging-rfis-100%e7%a6%bb%e5%ad%90%e6%ba%90%e8%a3%85%e7%bd%ae%e3%80%81bis%e5%b0%84%e9%a2%91%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81bis-g-1%e5%92%8cg-2%e5%9e%8b%e7%a6%bb%e5%ad%90%e6%9e%aa%e5%8a%a0-3\/","title":{"rendered":"Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001BIS\u5c04\u9891\u79bb\u5b50\u6e90\u3001BIS G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001BIS RF\u79bb\u5b50\u6e90"},"content":{"rendered":"

Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e<\/a>\u3001BIS\u5c04\u9891\u79bb\u5b50\u6e90<\/a>\u3001BIS G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf<\/a>\u3001BIS RF\u79bb\u5b50\u6e90<\/a><\/h3>\n
\n

BIS<\/strong>\u4ecb\u7ecd\u4e86\u65b0\u578bRFIS-100<\/a>\u79bb\u5b50\u6e90<\/a>\u88c5\u7f6e\u3002RFIS-100\u88ab\u8bbe\u8ba1\u6210\u53ef\u6839\u636e\u6807\u51c6\u8fdb\u884c\u6539\u88c5G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf<\/a>\u3002\u79bb\u5b50\u6e90\u572813.56 MHz\u7684RF\u7535\u6e90\u4e0b\u5de5\u4f5c\uff0c\u624b\u52a8\u8c03\u8282\u5339\u914d\u7f51\u7edc\u4ee5\u4ea7\u751f\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53(ICP)\u3002\u4e0e\u6807\u51c6\u7684Colutron\u70ed\u9634\u6781DC\u653e\u7535\u6e90\u76f8\u6bd4\uff0cRF\u79bb\u5b50\u6e90<\/a>\u5177\u6709\u8bb8\u591a\u4f18\u70b9\uff0c\u5305\u62ec\u7ef4\u62a4\u95f4\u9694\u65f6\u95f4\u66f4\u957f\uff0c\u5c24\u5176\u662f\u4f7f\u7528\u6c27\u6c14\u548c\u6d3b\u6027\u6c14\u4f53\u65f6\uff0c\u4ee5\u53ca\u66f4\u9ad8\u7684\u675f\u6d41\u3002<\/p>\n

\"RFIS-100\"<\/p>\n

\"\"<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Ion Source Flange<\/th>\n6\u201d (152mm) Conflat<\/td>\n<\/tr>\n
RF Power Supply<\/th>\n13.56MHz, 500W<\/td>\n<\/tr>\n
Sputter Target, Metal Ions (Optional)<\/th>\n200V, 0.5A<\/td>\n<\/tr>\n
RF Antenna<\/th>\n6.5 Turn, 2mm diameter Cu tube, water cooled, 1\/8\u2033 VCR<\/td>\n<\/tr>\n
Gas Isolator<\/th>\n10kV Isolation, 1\/8\u201d Swagelok input<\/td>\n<\/tr>\n
RF Antenna Feedthrough<\/th>\n5kV Isolation, Copper, 1\/8\u2033 VCR<\/td>\n<\/tr>\n
Plasma Start Circuit<\/th>\n12kV Isolation feedthrough<\/td>\n<\/tr>\n
Water Cooling Requirement<\/th>\n1 Liter\/min (RF Antenna)<\/td>\n<\/tr>\n
Force Air Cooling Requirement<\/th>\nFan built into Plexiglas Enclosure for High Voltage Safety protection. (Fan Specification:47 CFM, 12VDC, 200mA)<\/td>\n<\/tr>\n
RF Match Network<\/th>\nTwo Vacuum variable capacitors (Tune, Load), 10-1200 pF, 4kV (Nominal), 6kV (Max), 75A (Manual Tune), Pmax=15kW (@40MHz)<\/td>\n<\/tr>\n
RFMB-100 Match Box Input Connections (5)<\/th>\n2 X 1\/4\u201d Swagelok, Water cooling, RF Antenna, 1\/8\u201d Swagelok, Source Gas Inlet, RF Type N, Male, BNC, Male, Sputter Target Supply<\/td>\n<\/tr>\n
\u6a21\u578b<\/th>\nRFIS-100, RFIS-101, RFIS-007, RFIS-010, RFMB-100, RFMB-200<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

RFIS-100\u88ab\u8bbe\u8ba1\u6210\u53ef\u6839\u636e\u6807\u51c6\u8fdb\u884c\u6539\u88c5G-1\u548cG-2\u578b\u79bb\u5b50\u67aa<\/a>\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u79bb\u5b50\u6e90\u572813.56 MHz\u7684RF\u7535\u6e90\u4e0b\u5de5\u4f5c\uff0c\u624b\u52a8\u8c03\u8282\u5339\u914d\u7f51\u7edc\u4ee5\u4ea7\u751f\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53(ICP)\u3002\u4e0e\u6807\u51c6\u7684Colutron\u70ed\u9634\u6781DC\u653e\u7535\u6e90\u76f8\u6bd4\uff0cRF\u79bb\u5b50\u6e90\u5177\u6709\u8bb8\u591a\u4f18\u70b9\uff0c\u5305\u62ec\u7ef4\u62a4\u95f4\u9694\u65f6\u95f4\u66f4\u957f\uff0c\u5c24\u5176\u662f\u4f7f\u7528\u6c27\u6c14\u548c\u6d3b\u6027\u6c14\u4f53\u65f6\uff0c\u4ee5\u53ca\u66f4\u9ad8\u7684\u675f\u6d41\u3002\u9664\u4e86\u80fd\u591f\u4ece\u6c14\u4f53\u4e2d\u4ea7\u751f\u79bb\u5b50\u4e4b\u5916\uff0c\u65b0\u7684\u79bb\u5b50\u6e90\u5177\u6709\u901a\u8fc7\u5728\u653e\u7535\u5ba4\u4e2d\u7528\u91d1\u5c5e\u9776\u6e85\u5c04\u6e90\u6c14\u4f53\u6765\u4ea7\u751f\u91d1\u5c5e\u79bb\u5b50\u7684\u989d\u5916\u80fd\u529b\u3002\u8fd8\u6ca1\u6709Colutron\u79bb\u5b50\u67aa\u7684\u5ba2\u6237\u53ef\u4ee5\u8d2d\u4e70\u65b0\u7684\u79bb\u5b50\u6e90\uff0c\u4ee5\u9002\u5408\u4ed6\u4eec\u81ea\u5df1\u7684\u79bb\u5b50\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u62e5\u6709Colutron\u79bb\u5b50\u67aa\u7684\u7528\u6237\u5c06\u4ece\u79bb\u5b50\u67aa\u4e0a\u53d6\u4e0b\u6807\u51c6\u7684Colutron DC\u79bb\u5b50\u6e90\u548c\u6563\u70ed\u5668\u7ec4\u4ef6\uff0c\u5e76\u5c06RF\u79bb\u5b50\u6e90\u76f4\u63a5\u8fde\u63a5\u5230Colutron 500\u578b\u7edd\u7f18\u4f53\u6cd5\u5170\u4e0a\u3002\u5c04\u9891\u6e90\u4e0d\u9700\u8981Colutron\u6563\u70ed\u5668\u5373\u53ef\u5de5\u4f5c\u3002<\/p>\n

\n
\n
\"RFIS-100\"<\/a><\/div>
\u79bb\u5b50\u6e90\u90e8\u4ef6<\/figcaption><\/figure>\n
\n
\"RFIS-100\"<\/a><\/div>
RFIS-101\u79bb\u5b50\u6e90\u7ec4\u4ef6<\/figcaption><\/figure>\n<\/div>\n<\/div>\n
<\/figure>\n

G-2 \u548c G-2-D<\/a>\u3001\u5149\u675f\u6210\u50cf\u89e3\u51b3\u65b9\u6848 \uff08BIS)<\/a>\u3001\u79bb\u5b50\u67aa G-1 \u548c G-1-D \u578b\uff08\u4e0d\u53ef\u70d8\u70e4\uff09<\/a>\u3001\u79bb\u5b50\u67aa G-2 \u548c G-2-D \u578b\uff08\u53ef\u70d8\u70e4\uff09<\/a>\u3001\u79bb\u5b50\u67aa\u7cfb\u7edf<\/a>\u3001\u7f8e\u56fd Beam Imaging Solutions<\/a><\/p>\n

\n
\n
\n
<\/div>\n<\/figure>\n<\/div>\n<\/div>\n
Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e<\/a>\nBIS G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf<\/a>\nBIS RF\u79bb\u5b50\u6e90<\/a>\nBIS\u5c04\u9891\u79bb\u5b50\u6e90<\/a>\nG-2 \u548c G-2-D<\/a>\n\u5149\u675f\u6210\u50cf\u89e3\u51b3\u65b9\u6848 \uff08BIS)<\/a>\n\u79bb\u5b50\u67aa G-1 \u548c G-1-D \u578b\uff08\u4e0d\u53ef\u70d8\u70e4\uff09<\/a>\n\u79bb\u5b50\u67aa G-2 \u548c G-2-D \u578b\uff08\u53ef\u70d8\u70e4\uff09<\/a>\n\u79bb\u5b50\u67aa\u7cfb\u7edf<\/a>\n\u7f8e\u56fd Beam Imaging Solutions<\/a><\/div>","protected":false},"excerpt":{"rendered":"

Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001BIS\u5c04\u9891\u79bb\u5b50\u6e90\u3001BIS G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001BIS RF\u79bb\u5b50\u6e90 BIS\u4ecb\u7ecd\u4e86\u65b0\u578bRFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3002R <\/p>\n","protected":false},"author":12,"featured_media":159,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[23,74,75,73,113,114,115,116,117,118],"yoast_head":"\nBeam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001BIS\u5c04\u9891\u79bb\u5b50\u6e90\u3001BIS G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001BIS RF\u79bb\u5b50\u6e90<\/title>\n<meta name=\"description\" content=\"Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001BIS G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001BIS 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