{"id":402,"date":"2024-09-28T12:25:37","date_gmt":"2024-09-28T04:25:37","guid":{"rendered":"https:\/\/www.bihec.com\/beam-imaging\/?p=402"},"modified":"2024-09-28T12:25:37","modified_gmt":"2024-09-28T04:25:37","slug":"beam-imaging-solutions-rfis-100-%e7%a6%bb%e5%ad%90%e6%ba%90%e7%bb%84%e4%bb%b6%e5%b0%84%e9%a2%91%e7%a6%bb%e5%ad%90%e6%ba%90","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/beam-imaging\/beam-imaging-solutions-rfis-100-%e7%a6%bb%e5%ad%90%e6%ba%90%e7%bb%84%e4%bb%b6%e5%b0%84%e9%a2%91%e7%a6%bb%e5%ad%90%e6%ba%90\/","title":{"rendered":"Beam Imaging Solutions RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90"},"content":{"rendered":"

Beam Imaging Solutions RFIS-100<\/a> \u79bb\u5b50\u6e90<\/a>\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90<\/a><\/h2>\n

Beam Imaging Solutions<\/a> \uff08BIS\uff09<\/strong>\u00a0\u63a8\u51fa\u65b0\u578b RFIS-100<\/a> \u79bb\u5b50\u6e90\u7ec4\u4ef6\u3002RFIS-100 \u8bbe\u8ba1\u4e3a\u53ef\u6539\u88c5\u5230\u6807\u51c6\u578b\u53f7 G-1 \u548c G-2 \u79bb\u5b50\u67aa<\/a>\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u79bb\u5b50\u6e90\u4f7f\u7528 13.56 MHz \u7684\u5c04\u9891\u7535\u6e90\u8fd0\u884c\uff0c\u5177\u6709\u624b\u52a8\u8c03\u6574\u5339\u914d\u7f51\u7edc\uff0c\u4ee5\u4ea7\u751f\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53 \uff08ICP\uff09\u3002\u4e0e\u6807\u51c6 Colutron \u70ed\u9634\u6781\u76f4\u6d41\u653e\u7535\u6e90\u76f8\u6bd4\uff0cRF \u79bb\u5b50\u6e90\u5177\u6709\u8bb8\u591a\u4f18\u52bf\uff0c\u5305\u62ec\u66f4\u957f\u7684\u7ef4\u62a4\u95f4\u9694\u65f6\u95f4\uff0c\u5c24\u5176\u662f\u5728\u4f7f\u7528\u6c27\u6c14\u548c\u6d3b\u6027\u6c14\u4f53\u65f6\uff0c\u4ee5\u53ca\u66f4\u9ad8\u7684\u675f\u6d41\u3002<\/p>\n

Beam Imaging<\/a> Solutions \uff08BIS\uff09<\/strong>\u00a0\u63a8\u51fa\u65b0\u578b RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6\u3002RFIS-100 \u8bbe\u8ba1\u4e3a\u53ef\u6539\u88c5\u5230\u6807\u51c6\u578b\u53f7 G-1 \u548c G-2 \u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u79bb\u5b50\u6e90\u4f7f\u7528 13.56 MHz \u7684\u5c04\u9891\u7535\u6e90\u8fd0\u884c\uff0c\u5177\u6709\u624b\u52a8\u8c03\u6574\u5339\u914d\u7f51\u7edc\uff0c\u4ee5\u4ea7\u751f\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53 \uff08ICP\uff09\u3002\u4e0e\u6807\u51c6 Colutron \u70ed\u9634\u6781\u76f4\u6d41\u653e\u7535\u6e90\u76f8\u6bd4\uff0cRF \u79bb\u5b50\u6e90\u5177\u6709\u8bb8\u591a\u4f18\u52bf\uff0c\u5305\u62ec\u66f4\u957f\u7684\u7ef4\u62a4\u95f4\u9694\u65f6\u95f4\uff0c\u5c24\u5176\u662f\u5728\u4f7f\u7528\u6c27\u6c14\u548c\u6d3b\u6027\u6c14\u4f53\u65f6\uff0c\u4ee5\u53ca\u66f4\u9ad8\u7684\u675f\u6d41\u3002\u9664\u4e86\u80fd\u591f\u4ece\u6c14\u4f53\u4e2d\u4ea7\u751f\u79bb\u5b50\u5916\uff0c\u65b0\u7684\u79bb\u5b50\u6e90\u8fd8\u5177\u6709\u901a\u8fc7\u5728\u6392\u653e\u5ba4\u4e2d\u4f7f\u7528\u91d1\u5c5e\u9776\u6750\u6e85\u5c04\u6e90\u6c14\u4f53\u6765\u4ea7\u751f\u91d1\u5c5e\u79bb\u5b50\u7684\u9644\u52a0\u529f\u80fd\u3002\u5c1a\u672a\u62e5\u6709 Colutron \u79bb\u5b50\u67aa\u7684\u5ba2\u6237\u53ef\u4ee5\u8d2d\u4e70\u65b0\u79bb\u5b50\u6e90\uff0c\u4ee5\u9002\u5408\u4ed6\u4eec\u81ea\u5df1\u7684\u79bb\u5b50\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u62e5\u6709 Colutron \u79bb\u5b50\u67aa\u7684\u5ba2\u6237\u5c06\u4ece\u79bb\u5b50\u67aa\u4e0a\u62c6\u4e0b\u6807\u51c6 Colutron \u76f4\u6d41\u79bb\u5b50\u6e90\u548c\u6563\u70ed\u5668\u7ec4\u4ef6\uff0c\u5e76\u5c06\u5c04\u9891\u79bb\u5b50\u6e90\u76f4\u63a5\u8fde\u63a5\u5230 Colutron 500 \u578b\u7edd\u7f18\u4f53\u6cd5\u5170\u4e0a\u3002RF \u6e90\u4e0d\u9700\u8981 Colutron \u6563\u70ed\u5668\u5373\u53ef\u8fd0\u884c\u3002<\/p>\n

Beam Imaging Solutions \u79bb\u5b50\u6e90<\/a>\u7ec4\u4ef6\u6280\u672f\u4fe1\u606f<\/h2>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Ion Source Flange<\/th>\n6\u201d (152mm) Conflat<\/td>\n<\/tr>\n
RF Power Supply<\/th>\n13.56MHz, 500W<\/td>\n<\/tr>\n
Sputter Target, Metal Ions (Optional)<\/th>\n200V, 0.5A<\/td>\n<\/tr>\n
RF Antenna<\/th>\n6.5 Turn, 2mm diameter Cu tube, water cooled, 1\/8\u2033 VCR<\/td>\n<\/tr>\n
Gas Isolator<\/th>\n10kV Isolation, 1\/8\u201d Swagelok input<\/td>\n<\/tr>\n
RF Antenna Feedthrough<\/th>\n5kV Isolation, Copper, 1\/8\u2033 VCR<\/td>\n<\/tr>\n
Plasma Start Circuit<\/th>\n12kV Isolation feedthrough<\/td>\n<\/tr>\n
Water Cooling Requirement<\/th>\n1 Liter\/min (RF Antenna)<\/td>\n<\/tr>\n
Force Air Cooling Requirement<\/th>\nFan built into Plexiglas Enclosure for High Voltage Safety protection. (Fan Specification:47 CFM, 12VDC, 200mA)<\/td>\n<\/tr>\n
RF Match Network<\/th>\nTwo Vacuum variable capacitors (Tune, Load), 10-1200 pF, 4kV (Nominal), 6kV (Max), 75A (Manual Tune), Pmax=15kW (@40MHz)<\/td>\n<\/tr>\n
RFMB-100 Match Box Input Connections (5)<\/th>\n2 X 1\/4\u201d Swagelok, Water cooling, RF Antenna, 1\/8\u201d Swagelok, Source Gas Inlet, RF Type N, Male, BNC, Male, Sputter Target Supply<\/td>\n<\/tr>\n
Model<\/th>\nRFIS-100, RFIS-101, RFIS-007, RFIS-010, RFMB-100, RFMB-200<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Beam Imaging Solutions\u00a0 \u8367\u5149\u5c4f<\/a>\u89c4\u683c\uff1a<\/span><\/h2>\n

\u4ea7\u54c1\u539f\u7406\u56fe<\/h2>\n

RF \u4e0e DC \u6027\u80fd\u6570\u636e<\/h3>\n

RFIS-100 \u5728\u5ba2\u6237\u73b0\u573a\u4f7f\u7528 Colutron \u578b\u53f7 G-2 \u79bb\u5b50\u67aa\u7cfb\u7edf<\/a>\u8fdb\u884c\u4e86\u6d4b\u8bd5\u3002\u79bb\u5b50\u6e90\u5728 1\u30013\u30016 \u548c 9 keV \u4e0b\u4f7f\u7528\u6c16\u3001\u6c26\u548c\u6c29\u8fd0\u884c\u3002\u5c06\u8f93\u51fa\u79bb\u5b50\u675f\u6d41\u4e0e\u5728\u76f8\u540c\u675f\u6d41\u7535\u4f4d\u4e0b\u4f7f\u7528\u76f8\u540c\u6c14\u4f53\u7684\u6807\u51c6 Colutron 100 \u578b\u79bb\u5b50\u6e90\u8fdb\u884c\u4e86\u6bd4\u8f83\u3002\u5e73\u5747\u800c\u8a00\uff0c\u4e0e\u6807\u51c6 Colutron \u6e90\u76f8\u6bd4\uff0c\u4f7f\u7528 RF-100 \u6e90\u8fd0\u884c\u65f6\uff0c\u79bb\u5b50\u675f\u7535\u6d41\u6c34\u5e73\u9ad8\u51fa 3 \u5230 8 \u500d\u3002\u4e0b\u56fe\u663e\u793a\u4e86 RF-100 \u548c Colutron 100 \u578b\u76f4\u6d41\u706f\u4e1d\u6e90\u5728\u8ddd\u79bb\u79bb\u5b50\u67aa\u51fa\u53e3 44 \u5398\u7c73\u7684\u76f4\u5f84\u4e3a 2.5 \u5398\u7c73\u7684\u6cd5\u62c9\u7b2c\u676f<\/a>\u4e2d\u6536\u96c6\u7684 9keV He+ \u79bb\u5b50\u675f\u7535\u6d41\u3002\u8bb0\u5f55\u4e86 RF \u79bb\u5b50\u6e90\u7684\u79bb\u5b50\u7535\u6d41\u4e0e RF \u529f\u7387\u7684\u5173\u7cfb\uff0c\u4ee5\u53ca Colutron \u6e90\u7684\u9633\u6781\u653e\u7535\u7535\u6d41\u3002<\/p>\n

\"\"<\/a><\/p>\n

\u6e85\u5c04\u91d1\u5c5e\u79bb\u5b50\u675f\uff08\u53ef\u9009\uff09<\/h3>\n
\"RFIS-100\"<\/a>
RFIS-100 \u79bb\u5b50\u6e90\u6e85\u5c04\u9776\u6750\uff08Ni\u3001Cu\u3001Al\uff09<\/figcaption><\/figure>\n

\u7eaf\u91d1\u5c5e\u6e85\u5c04\u9776\u6750\u53ef\u4f5c\u4e3a\u751f\u4ea7\u91d1\u5c5e\u79bb\u5b50\u7684\u9009\u9879\u3002\u5706\u67f1\u5f62\u9776\u6750\u653e\u7f6e\u5728\u653e\u7535\u5ba4\u5185\uff0c\u5e76\u88ab\u6765\u81ea\u652f\u6301\u6c14\u4f53\uff08\u901a\u5e38\u662f\u6c29\u6c14\uff09\u7684\u79bb\u5b50\u6e85\u5c04\u3002\u4e3a\u4e86\u63a7\u5236\u79bb\u5b50\u8f93\u51fa\uff0c\u5c06\u9776\u6750\u7535\u504f\u7f6e\u4e3a\u8d1f\u503c\uff0c\u4ee5\u63d0\u9ad8\u652f\u6301\u6c14\u4f53\u7684\u6b63\u79bb\u5b50\u6e85\u5c04\u901f\u7387\u3002\u4e0b\u9762\u7684\u5b9e\u9a8c\u56fe\u663e\u793a\u4e86 3keV \u954d\u91d1\u5c5e\u79bb\u5b50\u8f93\u51fa\u76f8\u5bf9\u4e8e\u65bd\u52a0\u7684\u76ee\u6807\u504f\u7f6e\u7535\u538b\u7684\u8fd1\u4f3c\u7ebf\u6027\u589e\u52a0\u3002\u7528\u4e8e\u7535\u6d41\u6d4b\u91cf\u7684 Beam Imaging Solutions\u00a0FC-1 \u6cd5\u62c9\u7b2c\u676f\u5177\u6709 0.25 \u82f1\u5bf8\u7684\u5916\u5f84\u5b54\u5f84\uff0c\u4f4d\u4e8e\u8ddd\u79bb\u79bb\u5b50\u67aa\u51fa\u53e3\u7ea6 30 \u82f1\u5bf8\u5904\u3002<\/p>\n

\"\"<\/a><\/p>\n

BeamImaging<\/a>\nBeam Imaging<\/a>\nBeam Imaging HRBIS<\/a>\nBeam Imaging Solutions<\/a>\nBeam Imaging Solutions BOS-18<\/a>\nBeam Imaging Solutions BOS-18-IW<\/a>\nBeam Imaging Solutions BOS-25<\/a>\nBeam Imaging Solutions BOS-40-IW<\/a>\nBeam Imaging Solutions BOS-75-IW<\/a>\nBeam Imaging Solutions RFIS-007<\/a>\nBeam Imaging Solutions RFIS-010<\/a>\nBeam Imaging Solutions RFIS-100<\/a>\nBeam Imaging Solutions RFIS-101<\/a>\nBeam Imaging Solutions RFMB-100<\/a>\nBeam Imaging Solutions\u79bb\u5b50\u6e90<\/a>\nBeam Imaging Solutions \u79bb\u5b50\u6e90<\/a>\nBeam Imaging Solutions\u8367\u5149\u5c4f<\/a>\nBIS-BOS<\/a>\nBIS\u5c04\u9891\u79bb\u5b50\u6e90<\/a>\nBIS\u7535\u5b50\u675f\u89c2\u5bdf\u7cfb\u7edf<\/a>\nBOS-18<\/a>\nBOS-18-IW\u5149\u675f\u8f6e\u5ed3\u5206\u6790\u4eea<\/a>\nBOS-18\u5149\u675f\u89c2\u6d4b\u7cfb\u7edf<\/a>\nBOS-25\u7535\u5b50\u675f\u89c2\u5bdf\u7cfb\u7edf<\/a>\nBOS-40-IW<\/a>\nBOS-75-IW<\/a>\nBOS-75-IW\u7535\u5b50\u675f\u89c2\u5bdf\u7cfb\u7edf<\/a>\nHRBIS\u9ad8\u5206\u8fa8\u7387\u5149\u675f\u6210\u50cf\u7cfb\u7edf<\/a>\nQuadrupole QID-900-H<\/a>\n\u5c04\u9891\u79bb\u5b50\u6e90<\/a>\n\u7535\u5b50\u675f\u89c2\u5bdf\u7cfb\u7edf<\/a>\n\u771f\u7a7a\u7cfb\u7edf<\/a>\n\u771f\u7a7a\u8154<\/a>\n\u771f\u7a7a\u8367\u5149\u5c4f<\/a>\n\u79bb\u5b50\u675f\u504f\u8f6c\u5668<\/a>\n\u79bb\u5b50\u675f\u6d41\u51cf\u901f\u5668<\/a>\n\u79bb\u5b50\u6e90<\/a>\n\u8367\u5149\u5c4f<\/a>\n\u901f\u5ea6\u6ee4\u6ce2\u5668<\/a><\/div>","protected":false},"excerpt":{"rendered":"

Beam Imaging Solutions RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90 Beam Imaging Solutions \uff08BIS\uff09\u00a0\u63a8\u51fa\u65b0\u578b RFIS-100 \u79bb\u5b50\u6e90 <\/p>\n","protected":false},"author":29,"featured_media":403,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[18,45,44,47,49,51,55,56,61,62,58,60,63,59,54,53,3,8,65,48,7,50,46,52,12,15,57,43,39,64,6,20,19,40,36,29,22,16,27],"yoast_head":"\nBeam Imaging Solutions RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90<\/title>\n<meta name=\"description\" content=\"Beam Imaging Solutions RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90, BIS\u00a0\u63a8\u51fa\u65b0\u578b RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6\u3002RFIS-100 \u8bbe\u8ba1\u4e3a\u53ef\u6539\u88c5\u5230\u6807\u51c6\u578b\u53f7 G-1 \u548c G-2 \u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u674e\u73b2\uff1a17317355928\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.bihec.com\/beam-imaging\/beam-imaging-solutions-rfis-100-\u79bb\u5b50\u6e90\u7ec4\u4ef6\u5c04\u9891\u79bb\u5b50\u6e90\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Beam Imaging Solutions RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90\" \/>\n<meta property=\"og:description\" content=\"Beam Imaging Solutions RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6,\u5c04\u9891\u79bb\u5b50\u6e90, BIS\u00a0\u63a8\u51fa\u65b0\u578b RFIS-100 \u79bb\u5b50\u6e90\u7ec4\u4ef6\u3002RFIS-100 \u8bbe\u8ba1\u4e3a\u53ef\u6539\u88c5\u5230\u6807\u51c6\u578b\u53f7 G-1 \u548c G-2 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