Reinraumtechnik Lanz HMDS‐Oven VPO 50真空干燥箱
Vapor Prime HMDS Oven VPO 50
Features and Benefits
• Double-glass shatter-proof door
• User-friendly touch panel for set up and operation
• Maximum Temperature: 170°C*
• Temperature Sensor Error Surveillance
• Password-protected service and edit functions
• Vacuum interlock
• Vacuum pump switches on and off automatically
• Software level indicator for HMDS bottle
• Adjustable N2 flow into chamber
• Media valves located in a separate, lockable cabinet in rear of oven
• Vacuum gauge check
• System value check
• Pressure relief valve for N2
• Fire protection system
• Emergency switch
• Easy to disassemble side-mounted HMDS bottle
• Illuminated ON/OFF switches
• Tone signals end of process
• 12 months warranty
• CE marking
Facility Requirements
400 V, 3-phase + N + PE + PE for grounding, 50 Hz
Dimensions
• External: 730 x 665 x 665 mm (w x d x h)
• Chamber: 350 x 420 x 350 mm (w x d x h)
• Chamber: 50 l
• HMDS bottle: approx. 300 ml
• End vacuum: < 1 mbar
• Total weight: approx. 100 kg
Reinraumtechnik Lanz HMDS‐Oven VPO 50真空干燥箱
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