Thermionics Hanks HM2 Hydra, Dynamic Source e-Gun™ Evaporation Source Hanks 系列蒸发源电子枪

Our High-Efficiency Hanks HM² e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl. HM² e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically. 我们的高效Hanks HM²e-Guns™提供获得专利和屡获殊荣的模块化磁束聚焦系统，具有增强的光束准直性，消除了光束卷曲。 HM²e-Guns™的尺寸也是标准e-Guns的2/3，磁性效率提高了350%。 Our High-Efficiency Hanks HM² e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl. Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously. HM² e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically. 我们的高效Hanks HM²e-Guns™提供获得专利和屡获殊荣的模块化磁束聚焦系统，具有增强的光束准直性，消除了光束卷曲。我们创新的Hanks HM²Hydra设计由一（1）或两（2）个紧凑的坩埚和发射器阵列组成，它们彼此线性平移，可同时提供多达六种不同材料的共沉积。 HM²e-Guns™的尺寸也是标准e-Guns的2/3，磁性效率提高了350%。

Features:

Optimized emitter and sweep coil assemblies
Eliminations of pole pieces – vertically mounted magnets results in less magnetic flux
0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling” and source material eruptions
Precise and stable evaporation rates as low as 1-2 A/sec
35% smaller than traditional evaporation sources with equivalent volume, evaporation rate and power capacity
Available in HV [2×10^-9 Torr] and UHV [2×10^-11 Torr]
Ideal for sequential or co-evaporation
Power Supplies, Crucible Liners and other Accessories available

特征：优化的发射器和扫描线圈组件消除磁极片——垂直安装的磁铁导致磁通量减少 0-200Hz扫频，可重复，均匀蒸发，无“隧道效应”和源物质喷发精确稳定的蒸发速率低至1-2A/sec 比传统蒸发源小35%，具有同等体积、蒸发率和功率容量有高压[2×10-9Torr]和特高压[2 x 10-11Torr]两种非常适合顺序蒸发或共蒸发提供电源、坩埚衬里和其他配件

Models:

Single— 7 cc to 156 cc single crucible / 1 emitter – 6-20 kW
Single Rotary— 7 cc to 25 cc – 4 crucible / 1 emitter – 6 & 10 kW
Twin™— 10 cc, 15 cc, 40 cc – 2 crucible / 2 emitter – 10 & 15 kW
Triad™ — 10 cc, 15 cc, 40 cc – 3 crucible / 3 emitter – 6 & 10 kW
Quadra— 10 cc, 15 cc, 40 cc – 4 crucible / 4 emitter – 6 & 10 kW
Hydra-1™— Single array of 5 crucibles / 1-3 emitters (see Hydra description below for more details)
Hydra-2™— Dual array of 5 crucibles / 1-3 emitters, totaling 10 crucibles / 2-6 emitters (see Hydra description below for more details)

Hanks HM² e-Guns are manufactured and protected under one or more of the following patents: 4,835,789; 4,891,821; 4,947,404

Hanks HM² Hydra e-Gun™

Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously. The Hydra configuration’s efficient utilization of space allows for four (4) different combinations of six crucibles and up to forty-two permutations of two-metal combinations, are available for co-deposition in a single vacuum pumpdown. The Hydra eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the co-evaporation design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source. Hanks HM²Hydra电子枪™ 我们创新的Hanks HM²Hydra设计由一（1）或两（2）个紧凑的坩埚和发射器阵列组成，它们彼此线性平移，可同时提供多达六种不同材料的共沉积。 Hydra配置对空间的有效利用允许六个坩埚的四（4）种不同组合和两种金属组合的多达四十二种排列，可在单个真空泵中进行共沉积。 Hydra消除了相邻源的相互作用，而无需复杂的波束方向和笨重的场分流组件。因此，共蒸发设计允许接近源，以实现均匀的涂层和材料相互作用。此外，每个水源的单独水冷可以防止蒸汽积聚，并为每个水源配备单独的扫掠线圈，从而促进每个水源的运行参数与相邻水源的完全独立。

Hydra-1 & 2 Specifications

Feature	10 kW Model	15 kW Model
Maximum Power	10 kW	15 kW
Crucible volume	10/15 cc	40 cc
Emission voltage	10 kV	10 kV
Emission current	0 to 1.0 A	0 to 1.5 A
Filament	700 W	700 W
E-beam deflection	220°	220°
Beam spot size	.25″ diameter	.25″ diameter
Evaporation rate (for aluminum)	1 gm/min at 10 kW 3.6 microns at 25 cm	1.5 gm/min at 15 kW 50,000 Å min
X and Y sweep	Hyper-Unimelt Sweep (0-200 Hz)	Hyper-Unimelt sweep (0-200 Hz)
Water	3.0 gpm/crucible, common return (up to 30 gpm)	3.0 gpm/crucible, common return (up to 30 gpm)
Crucible material	OFE copper	OFE copper
Bakeout temp	230°C (446°F)	230°C (446°F)
e-Gun size–single array	6.25″ x 5.5″ x 15″	6.25″ x 5.75″ x 15″
e-Gun size–double array	6.25″ x 11″ x 15″	6.25″ x 11.5″ x 15″

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