NANO-MASTER, Inc. NTE-3000 热蒸发器
PC Controlled Table Top Thermal Evaporator with Lab View software. Recipe driven,
PC controlled power and temperature. Pressure, current, voltage and thickness display, fully interlocked.
Three levels of password protected access.
Capable of evaporation of metals or organics
Chamber: 12” Pyrex Bell Jar Chamber
Substrate: Up to 6” Sample Holder, rotating at 3, 10 RPM.
Vacuum: RV5 mechanical pump and 70 l/sec turbo molecular pump
Base Pressure: 5x10-6 Torr in a clean system.
Gauge: Edward Wide Range Gauge
Source: Dual crucible evaporators with pneumatic shutter. Easily replaceable crucibles or metal boats
Thickness Monitor : Thickness monitor and Nor Cal Crystal holder (up to 100 recipes)
Power Supply: 2kVA SCR Cont. Power Supply switch able between crucibles with accurate current control
Size: Al Cabinet 26” x 26” x 30”.
Power: 415VAC, 20A/Phase,50/60Hz, requires Chilled water 2G/min at 50 PSI, 90PSI dry air and N2 tank
for venting
NANO-MASTER, Inc. NTE-3000 热蒸发器
询价采购NANO-MASTER, Inc. NTE-3000 热蒸发器
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