Idonus Sarl Modular alignment system for shadow mask or other mask to substrate alignment 掩膜对准 [P1801-08] MAS200
Mechanical clamping for small size samples Ring with 4 clamps
Mechanical clamping ring for 100mm wafer
Mechanical clamping ring for 100mm wafer
Mechanical clamping ring for 100mm wafer
* size: up to 200mm
* standard model for alignment precision of typically 3 - 5 um (others on
request)
* base unit with 3 linear axis and 1 rotation axis and 2 tilt axis for
wedge error compensation
* chuck for 200mm wafer and mask
* vacuum switch
Idonus Sarl Modular alignment system for shadow mask or other mask to substrate alignment 掩膜对准 [P1801-08] MAS200
询价采购Idonus Sarl Modular alignment system for shadow ma
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