Reinraumtechnik Lanz HMDS‐Oven VPO 200真空干燥箱
Features and Benefits：
Construction Space-saving sliding door。
Easy to disassemble installed HMDS bottle。
Media valves located in a separate, lockable cabinet in rear of oven 。
Loading capacity 16 carriers for 150 mm wafers。
Process parameters ：
Maximum chamber temperature: 150°C。
Reachable End vacuum: < 1 mbar。
Adjustable N2 flow into chamber。
HMDS bottle: approx. 300 ml。
Controlling ：
Siemens PLC 。
Visualization and operation of oven functions and states via PC 。
Communication from PC to PLC via OPC-Server©。
batch record software, 15 steps per receipe 。
service functions。
User-friendly touch panel for set up and operation 。
Light tower for system status。
Hard- and software safety：
Password-protected service and edit functions。
Temperature sensor error detection。
Vacuum interlock。
Vacuum gauge check 。
Pressure relief valve for N2 。
Two-hand operation for opening and closing the door 。
Emergency switch。
CE marking。
Facility Requirements
400 V, 3-phase + N + PE + PE for grounding; 50 Hz, 32 Amp.
Dimensions
External: 1700 x 1300 x 2250 mm (w x d x h)
Chamber: 1143 x 560 x 300 mm (w x d x h)
Chamber: approx. 200 l
Total weight: approx. 500 kg
Reinraumtechnik Lanz HMDS‐Oven VPO 200真空干燥箱
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