Idonus Sarl Manual Motion System MAS150 P1801-07-00 样品台

Includes:

Modular alignment system for shadow mask or other mask
to substrate alignment
* size: up to 150mm
* standard model for alignment precision of typically 3 - 5 um
(others on request)
* base unit with 3 linear axis and 1 rotation axis and 2 tilt
axis for tilt (wedge) error compensation

 

Double Image Microscope for MAS
consists:
* Microscope tube lens (2 units)
* 5x Objective lens (2 units)
* Cameras (2 units) with image acquisition software
* LED VIS reflection illuminations (2 units)
* XYZ stage (2 units)
* Linear slider for DIM unit in/out
* Base and frame
Note: PC (not included) for camera image acquisition required

 

Machine Frame and Base with passive anti vibration table

 

Pneumatic Control Unit

 

wafer chuck 100mm diameter

 

wafer chuck only center hole for any substrate size

 

Mask chuck, size 5'' square