Idonus Sarl UV LED exposure system UV-EXP150S P0904-105-02 UV LED曝光系统
Mechanical clamping for small size samples Ring with 4 clamps
Mechanical clamping ring for 100mm wafer
Mechanical clamping ring for 100mm wafer
Mechanical clamping ring for 100mm wafer
size: 100mm
UV LED exposure system
Performances:
- Exposure area: 150mm square
- Collimation angle: < +/- 1.8°
- Working Distance: 400 mm
- Cooling type: heat pipe (= air fan)
- Size: ~400x400x780 mm
Performances:
- Exposure area: 150mm square
- Collimation angle: < +/- 1.8°
- Working Distance: 400 mm
- Cooling type: heat pipe (= air fan)
- Size: ~400x400x780 mm
UV-EXP Control Unit (Gen. 3) with 10-inch touch screen
(standalone version).
System suitable for the control of single and multiwavelength UV-EXP exposure systems.
(standalone version).
System suitable for the control of single and multiwavelength UV-EXP exposure systems.
UV Sensor (GaP) for irradiance measurement and feedback control
Mixed wavelength LED with 365+405nm individual
controllable
Details:
- Wavelength: mixed 365+405nm
- Irradiance (optical power density): typically 60 mW/cm²
(adjustable 10% to 100%)
- Wavelength ratio:
365nm -> max 60%
405nm -> max 40%
- Uniformity: Michelson contrast, C = (max-min)/(max+min) typically 3% at 365 nm
controllable
Details:
- Wavelength: mixed 365+405nm
- Irradiance (optical power density): typically 60 mW/cm²
(adjustable 10% to 100%)
- Wavelength ratio:
365nm -> max 60%
405nm -> max 40%
- Uniformity: Michelson contrast, C = (max-min)/(max+min) typically 3% at 365 nm
Adaptable collimation angle
Set of 3 aperture; manual exchange
Set of 3 aperture; manual exchange
UV safety shield with vertical sliding door
询价采购Idonus Sarl UV LED exposure system UV-EXP150S P0904-105-02 UV LED曝光系统
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