Thermionics Northwest, Inc. 定制真空镀膜系统 PRO25232
Four (4) pocket HC series Rotary e-Gun™, 7cc
e-Gun rotary indexer
Two (2) electrical feedthroughs mounted on a 2.75" O.D. CF flange, 12 kV @ 70 A
4-pin instrumentation feedthrough mounted on a 1.33" O.D. CF flange, comes with atmosphere side feedthrough connector.
External HV Lug Kit, OFHC copper
Single cover for 2.75" O.D. CF flange, dual pass F/T
High Voltage Grounding Probe
Solid State Electron Beam Power Supply:
*6kW @ -10kV, 3 Phase, 50/60 Hz.
*Specify 208 or 400VAC input power
*Maximum Emission Current is 600mA
*Output Voltage Adjustable from -0kv to -10kV
SVA Remote Control - remote control and display of high voltage and emission current.
Digital Sweep
Deposition Controller, capable of supporting two sensors and controlling two sources sequentially (expandable to four sensors/sources).
Source shutter
Substrate shutter
EMC Series 3-Axis UHV Precision Manipulator
Magnetically Coupled Rotary Feedthrough
Custom Nipple To adapt RNN™ Seal to travel flange of EMC Manipulator
RNN™ Series Differentially Pumped Rotary Seal
Valve Manifold System, Allows 1st Stage Pump to Evacuate 2nd Stage Pump
Support tube, protect tube assemblies
RFH series Utility Feedthrough Hat
Sample mount components required to integrates support tube with gearbox/dock achieving sample orientation and location consistent with application requirements
Gearbox for 3" Sample
HRN-3 radiant resistive heater assembly
LN2 Cooling Through Ball Bearings
Heater Power Vacuum Feedthrough
LN2 Vacuum Feedthrough
Single Thermocouple Vacuum Feedthrough
Custom Dock Assembly for 3.0" OD Sample Tungsten copper material with machined outer race for cooling through the balls
Sample transfer fork that mounts to Linear-Rotary device
Thermionics Stepper Motor Controller
Radiant Resistive Heater Power Supply
Custom Load-lock chamber per drawing number SN100934-25
Dual Axis Tilt StageKnob adjust on two axes
Magnetically coupled linear-rotary drive
Viewport shutter, manually actuated
Zero profile Wide Angle Viewport
Replacement seal set for RNN-150 set of 3 graphite impregnated PTFE seals
ZB Series UHV Linear TranslatorRigid
Thermionics Stepper Motor ControllerXX axis with 3.0 Amps output (4.2 peak)
Hardware end limit input
USB computer interface for computer control
Thermionics Northwest, Inc. 定制真空镀膜系统 PRO25232
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