LK Technologies Model ELS5000 High Resolution Electron Energy Loss Spectrometer 高分辨率电子能谱仪
Flange mounted spectrometer with all necessary electrical and mechanical feedthroughs. Dual magnetic
shields are provided at the flange to interface with the chamber magnetic shields. Consists of cylindrical
double pass monochromator and single pass analyzer. Nominal mounting is on 12" O.D. conflat flange.
Analyzer rotatable from straight through position to 78° away.
Digital control electronics package for control of the Model ELS5000 spectrometer. Includes digital control of
spectrometer voltages and readout of critical currents. Package includes picoammeter, noise reduction filter,
power supply, PC compatible computer and interface equipment. Includes software for data acquisition and
control of spectrometer voltages. Includes Model LK2000-CE counting electronics package with necessary
interface. Operation is for 0-240 eV kinetic energy. Scan range nominal 45eV. Ripple on voltages less than 1
millivolt p-p. Electronics is based on a grounded sample method (no need to bias sample to achieve beam
energy).
Software is new Windows based version with auto tuning options and USB computer interface.
General Performance Specification
The ELS5000 has achieved a resolution of 0.5 meV.
Typical performance specifications are as follows, based on direct beam geometry:
1meV FWHM Detector current greater than 10 pA
2meV FWHM Detector current greater than 70 pA
Factory test shall be 3 meV FWHM at detector current greater than 80 pA
Acceptance angles of analyzer unit:
4eV Beam energy ± 1.5° (dispersive plane)
± 1.7° (non-dispersive plane)
100eV Beam energy ± 0.4° (dispersive plane)
± 1.7° (non-dispersive plane)
LK Technologies Model ELS5000 High Resolution Electron Energy Loss Spectrometer 高分辨率电子能谱仪
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